MEMS-based Nanomanipulators/ Nanopositioners
Project Number
1458
Description
Background
Researchers in nanotechnology require manipulators with a nanometer positioning resolution, micrometer motion range, high repeatability, and large force output (i.e. payload driving capability). Current manipulators are often too large for applications inside SEM (scanning electron microscope) or TEM (transmission electron microscope). They also have inherent hysteresis and creep resulting in significant open-loop positioning errors requiring sophisticated compensation control algorithms.
Technology
We offer a MEMS-based nanomanipulator with sub-nanometer motion resolution and milli Newton force output for manipulation or positioning purposes. The advantages include small size, low cost, closed-loop operation, high motion resolution, large force output and multi-axis positioning.
